Introduction
when the intensity of the digital image signal obtained exceeds a threshold value, the digital image signal is detected as a defect. Based on the maximum intensity of a noise signal in a digital image signal, sets the threshold value.
principle means
which may correspond to the density of the pattern has defects automatically set corresponding to the size of the defective portion detection sensitivity size determination area, defect inspection.
The defect inspection method comprising:
on the basis of the reference image data, in a width direction of a plurality of measurement pattern, and the reference image data into a pattern corresponding to the above-described the width of each luminance direction, making each direction corresponding to the plurality of scan image data; comparing the above plurality of scan image data, and the scanned image data selected from such a minimum brightness of the minimum brightness, making the width of the image data;
on the basis of the inspection image data and the reference image data, extracting the defective portion and will be the width of the pattern size conversion measured in the direction of minimum brightness of luminance, making the image data of defect size;
and that image data based on the defect size and the width of the above-described image data, the defective part for defect determination.
Check Step
one kind of defect inspection method, which is drawn as a pattern image to be inspected, the inspection for the body to be inspected based on the image data and the reference image data acquired defect inspection, characterized by comprising:
a first step, based on the reference image data on a plurality of measurement directions of the pattern width, and the reference image data into a pattern corresponding to the above the width of the luminance in each direction, making the image data corresponding to a plurality of scanning in each direction;
the second step of comparing the plurality of scan image data, and the scanned image data is selected from those a minimum luminance minimum brightness, making the width of the image data;
third step, which extracts the reference image data based on the defective portion of the image data to be inspected and the width of the pattern will be the minimum luminance measurement of the defective portion direction dimension is converted into brightness, making defect size image data;
fourth step, which based on the defect size image data of the above-described width of the image data, for the above-mentioned drawbacks defect portion determination .
About Patent invention
defect inspection method and a defect inspection apparatus using the method, by a single shot can be detected as irregular defect and color defect of the molded surface.
principles
to the surface of the object under examination, while driving the lighting unit and the oblique incident illumination reflected coaxial illumination unit for illumination, and photographed by a camera in the illumination . In the illumination unit are provided with a light source emitting colored IPL, and, in the lighting section turns on only one of these three kinds of light sources, the lighting unit in the lighting unit is not lit illumination one or two light sources . Defect inspection data processing system
structure
invention includes: a client computer which has made the manufacturing process for processing the image as a two-dimensional image of the inspection object image to be acquisition means and the image acquired by the acquisition means as image data transmission device for data transmission; database, from the client computer for recording the transferred image data; and a host computer, the database having from for said image data read out defect information extraction means extracting the defect, and means for determining the defect according to the defect information extracted by the extracting means is checked whether the object is qualified adequacy determining means, to the client computer and the host computer be configured separately, it is connected through a communication line.